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利用离子束辅助沉积技术在Tc4钛合金基体上制备了TiCxNy膜。TEM观察揭示膜呈多晶结构，具有（111），（200）和（220）择优取向，AES和XPS分析进一步证实TiCxNy膜呈含氧配置。膜的硬度和摩擦特性与N含量有关，N的含量过高，其硬度与摩擦特性均会下降。在本实验条件下，N离子束的最佳辅助剂量为3×10（17）ions／cm2。干摩擦表明膜的抗氧化性能优良，其存在能有效抑制基体在摩擦过程中形成氧化层。又因腹的硬度高，润滑住良好，显著地改善了基体的磨损特性，特别是粘着磨损特性。
TiCxNy films were prepared on Tc4 titanium alloy by ion beam assisted deposition. TEM observation revealed that the films were polycrystalline with (111), (200) and (220) preferential orientations. AES and XPS analysis further confirmed that the TiCxNy films were in an oxygen-containing configuration. Film hardness and friction characteristics and N content, N content is too high, the hardness and friction characteristics will decline. Under this experimental condition, the optimum dose of N ion beam is 3 × 10 (17) ions / cm2. Dry friction shows that the membrane has excellent oxidation resistance, and its existence can effectively inhibit the formation of an oxide layer during the rubbing process. Due to the high hardness of the belly, it lubricated well and markedly improved the wear characteristics of the substrate, especially the adhesive wear characteristics.