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针对高灵敏度的光纤布拉格光栅(FBG)振动传感器的抗冲击可靠性,设计了一种具有限振结构的双悬臂梁型FBG振动传感器,理论分析了结构参数与灵敏度和振动位移的关系,进行了结构优化,确定了限振幅度。制作了限振幅度约为90μm的传感器样品,对传感器的加速度灵敏、频率响应、抗冲击性能进行了测试,结果表明,传感器的加速度灵敏度达到525 pm/g,谐振频率约为66 Hz,传感器经过50 g反复冲击,频响特性具有良好重复性,表明传感器具有较高的可靠性。
Aiming at the impact reliability of highly sensitive fiber Bragg grating (FBG) vibration sensor, a double-cantilever type FBG vibration sensor with a finite vibration structure was designed. The relationship between the structural parameters and sensitivity and vibration displacement was theoretically analyzed. Structural optimization, to determine the amplitude limit. A sensor sample with a limit amplitude of about 90μm was fabricated. The accelerometer sensitivity, frequency response and impact resistance of the sensor were tested. The results show that the sensitivity of the sensor reaches 525 pm / g and the resonant frequency is about 66 Hz. 50 g repeated impact, frequency response with good repeatability, indicating that the sensor has high reliability.