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四、工艺改进 1.导言在这一部分中将讨论工艺技术的改进和应用,以及在MOM制造中出现的问题。这些问题需要涉及到最终器件的制造。 2.MOM结构 (1)MOM技术的优点一个器件的工作电流和输出功率直接依赖于发射极周长,所需的发射极周长应在尽可能小的基极和发射极面积内作成,以便获得最大的效率和功率增益。为满足上述要求,在技术许可的情况下,把发射极条作得又窄又长,因而在一个很小的有源基区和发射区范围内得到一个大的发射极周长。窄的金属条要求以梳状结构降低条宽,但这要产生附加的电阻。其结果将增加电压降,它将引起沿着发射极条长的注入下降。因减小条宽引起的问题可由增加金属化厚度
Fourth, the process improvement 1. Introduction In this section will discuss the improvement and application of process technology, as well as MOM manufacturing problems. These issues need to involve the manufacture of the final device. 2.MOM Structure (1) The Advantages of MOM Technology The operating current and output power of a device are directly dependent on the emitter circumference, and the required emitter circumference should be made in as small a base and emitter area as possible in order to obtain the maximum The efficiency and power gain. In order to meet the above requirements, the emitter strip is made narrower and longer when technically possible, resulting in a large emitter circumference over a small active base and emitter region. Narrow metal strips require a comb-like structure to reduce the width of the strip, but this creates additional resistance. As a result, the voltage drop will increase, which will cause the injection down the emitter length. The problem caused by reducing the width of the strip can be increased by the thickness of the metal