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针对微电子加工等超精密制造领域高精度和超洁净等要求,提出了一种平面型磁悬浮平台。介绍了平台的结构及工作原理,通过电磁力的优化计算得到系统的等效质量,建立了系统分散控制的动态等效单自由度模型。讨论了系统刚度阻尼和控制系统之间的关系,在此基础上确定了各控制参数随平台运动位置的函数关系。最后给出了平台的悬浮波形,仿真结果表明,在动态控制参数下,系统超调量更小;实验结果表明,系统动态响应快,具有良好的悬浮性能,鲁棒性强。
Aiming at the requirements of high precision and ultra-cleanliness in the fields of ultra-precision manufacturing such as microelectronics processing, a planar magnetic suspension platform is proposed. The structure and working principle of the platform are introduced. The equivalent quality of the system is obtained through the optimization calculation of the electromagnetic force. The dynamic equivalent single degree of freedom model of decentralized control is established. The relationship between the system stiffness damping and the control system is discussed. On this basis, the control parameters are determined as a function of the platform motion. Finally, the floating waveform of the platform is given. The simulation results show that the system overshoot is smaller under the dynamic control parameters. The experimental results show that the system has fast dynamic response, good suspension performance and strong robustness.