碳、硼、氮及氧等元素在电子探针分析中常称之为超轻元素。这些元素的定量分析还存在许多包括测量和定量修正方面的困难。本文就质量吸收系数的不准确、超轻元素谱线的化学位移、及重元素的Ｌ、Ｍ、及Ｎ系谱线对其干扰等方面的问题进行研究和讨论，并分别提出了解决这些问题的方法。选择合适的标样是获得准确定量分析结果的关键。 Elements such as carbon, boron, nitrogen and oxygen are often referred to as ultra-light elements in electronic probe analysis. Quantitative analysis of these elements also has many difficulties, including measurement and quantitative correction. In this paper, the problems of inaccuracy of mass absorption coefficient, chemical shifts of super-light elemental lines, interferences of L, M, and N lines by heavy elements and so on are studied and discussed, and the solutions to these problems Methods. Choosing the right standard is the key to getting accurate, quantitative results.