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微透镜阵列与针孔阵列的组合光学器件是全场共焦检测系统中的一个关键器件。微透镜中心与针孔中心要求严格对准 ,相应的装配对准精度应控制在几微米之内。本文给出了一种可进行 5自由度高精度调节 ,并利用光学显微镜进行实时监测的对准方法。
The combination of a microlens array and a pinhole array optics is a key component in the confocal detection system. Micro-lens center and pinhole center require strict alignment, the corresponding assembly alignment accuracy should be controlled within a few microns. In this paper, a method of alignment with high accuracy of 5 degrees of freedom and real-time monitoring with optical microscope is presented.