本文对与干涉测距仪(IDM)测量不确定度有关的参数进行了讨论。采用一个简单、鲁棒装置测量了约12 cm距离,扩展不确定性为±16.4μm,发现测量不确定度受波长测量精度制约。该设置可测量距离达56 m,它也能够轻松确定测量臂和参考臂之间等光程差的点。LabVIEW程序用于条纹的计数,快速傅立叶变换(FFT)对噪声按频率进行选择性过滤。虽然本文对不确定性的测定不能代表同类测量距离的最高不确定度,但该测量方法提供了可溯源于长度单位为米的测量值。 This paper discusses the parameters related to the measurement uncertainty of the Interferometric Rangefinder (IDM). A simple, robust device was used to measure a distance of about 12 cm with an extended uncertainty of ± 16.4 μm. The measurement uncertainty was found to be limited by the wavelength measurement accuracy. The setup can measure distances up to 56 m and it is also easy to determine the point of equal path difference between the measuring arm and the reference arm. The LabVIEW program is used for stripe counting, Fast Fourier Transform (FFT), selective filtering of noise by frequency. Although the uncertainty in this article does not represent the highest uncertainty of measurement distance in its class, this measurement provides measurements traceable in meters of length.