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在一直径为 ８０ ｍｍ的喷动流化床反应装置系统中进行了三氯氢硅的氢还原反应实验．研究了 颗粒硅的生长速率与颗粒硅的初始粒径和三氯氢硅分压的关系，建立了颗粒硅的生长速率模型，并用实 验数据进行关联，得到如下的半经验、半理论模型，该模型能较好地与实验数据相吻合，实验结果证明了 用流态化技术进行颗粒硅生产的可行性．与西门子工艺相比，流化床工艺可以提高原料气的转化率，降 低能耗和氢配比．因而多晶硅的流态化技术研究有着很好的发展前景。
Hydrogen reduction experiments of trichlorosilane were carried out in a spout-fluidized bed reactor system with a diameter of 80 mm. The relationship between the growth rate of grain silicon and the initial particle size of silicon and the partial pressure of trichlorosilane were studied. The growth rate model of grain silicon was established and correlated with the experimental data. The semi-empirical and semi-theoretical models The model is in good agreement with the experimental data and the experimental results demonstrate the feasibility of using fluidized technology for particle silicon production. Compared with the Siemens process, the fluidized bed process can improve the conversion rate of feed gas, reduce energy consumption and hydrogen ratio. Therefore, the study of fluidization technology of polysilicon has a good prospect.