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高分辨率、高精确度的偏振干涉测长方法在几何量测量中得到了广泛的应用。本文应用严格的数学方法分析了它的测量误差,并提出补偿与消减该项误差的方法。
High-resolution, high-precision polarization interferometry method has been widely used in geometric measurement. In this paper, we use rigorous mathematical method to analyze its measurement error and propose a method to compensate and reduce this error.