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本文介绍了在新结构的 Moser—Poltz 压缩真空计中,采用了激光干涉测量技术,使小室下缘汞平面的平面度可控制在1.6×10~(-4)mm 以内,测量粗管内汞柱高度变化的不确定度小于1.7×10~(-2)mm(以3δ计算)。从而有效地提高了该计的压力测量精度,成为10~(-6)～10~(-2)Pa 压力测量范围内的一项实用真空标准。
In this paper, a new structure of the Moser-Poltz compression gauge is introduced. Laser interferometry is used to control the flatness of the lower mercury plane within 1.6 × 10 ~ (-4) mm. The uncertainty of altitude change is less than 1.7 × 10 ~ (-2) mm (calculated as 3δ). Which effectively improves the pressure measurement accuracy of the gauge and becomes a practical vacuum standard in the pressure measurement range of 10 ~ (-6) ~ 10 ~ (-2) Pa.