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微电机械系统(MEMS)光开关是微电机系统技术与传统光学技术相结合的新型机械式光开关。采用纵横交换网络和通断型微镜实现4×4微电机械系统光开关阵列,利用球透镜单模光纤准直器作为微电机械系统光开关阵列的输入、输出端口。运用高斯光束耦合理论对光开关阵列插入损耗(IL)进行了理论计算,并对引起插入损耗的主要因素进行了分析。对于失调容限:输入与输出光纤准直器位置失调2μm,定位角度失调0.15°,微镜非垂直反射角度失调0.15°,制作了4×4微电机械系统光开关阵列,对其各个通道的插入损耗进行了实验测试,其中最大值为2.77dB。
Micro-electro-mechanical system (MEMS) optical switch is a new type of mechanical optical switch combined with the micro-motor system technology and the traditional optical technology. A 4 × 4 micro-electro-mechanical system optical switch array is implemented by using a crossbar switching network and an on-off micromirror, and a ball lens single-mode optical fiber collimator is used as an input and output port of the micromechanical system optical switch array. The Gaussian beam coupling theory is used to theoretically calculate the insertion loss (IL) of the optical switch array, and the main factors causing the insertion loss are analyzed. For the offset tolerance: input and output fiber collimator position mismatch 2μm, positioning angle offset 0.15 °, micromirror non-vertical reflection angle offset 0.15 °, made a 4 × 4 micro-mechanical system optical switch array for each channel of Insertion loss was tested experimentally, with a maximum of 2.77dB.