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本文讨论了弹性狭缝机构的特点、设计原理及加工工艺,该狭缝机构具有结构简单,精度高和优异的超高真空性能。特别适用于真空紫外单色仪的光学狭缝,其设计原理也可用于一般光学狭缝的设计。
This article discusses the characteristics of elastic slit mechanism, design principle and processing technology. The slit mechanism has the advantages of simple structure, high precision and excellent ultra-high vacuum performance. Especially suitable for vacuum UV monochromator optical slit, the design principle can also be used for general optical slit design.