TOKUYAMA公司研制出一种新型透镜材料 ,该材料将对新一代半导体制造用步进机 (缩小投影曝光装置 )的发展起关键作用。该公司在世界上首次成功地拉制出大直径氟化钙单晶 ,并即将投入批量生产。然而 ,制作大尺寸且高合格率的透镜材料仍很困难。为此 ,一些步进机制造公司计划采用 TOKUYAMA Corporation has developed a new type of lens material that will play a key role in the development of next-generation semiconductor manufacturing steppers (narrow projection exposure units). For the first time in the world, the company has succeeded in drawing large diameter calcium fluoride single crystals and is going to mass production soon. However, it is still difficult to produce large size and high yield lens materials. To this end, some stepper manufacturing companies plan to adopt