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通过对Ｃｏ扩散阻挡层在ＣＶＤ过程中冶金行为的理论分析，建立了计算Ｃｏ扩散阻挡层临界厚度δ临的数学模型。指出：阻挡层厚度δ≥δ临是抑制Ｃｏ对金刚石沉积不良影响的必要条件。
Based on the theoretical analysis of metallurgical behavior of Co diffusion barrier during CVD, a mathematical model for calculating the critical thickness δ of Co diffusion barrier was established. It is pointed out that the thickness of barrier layer δ≥δ is the necessary condition to suppress the influence of Co on the diamond deposition.