论文部分内容阅读
专利申请范围离子氮化处理装置的特点是,发热体上下至少有两区以上,按纵向排列方式,分区地设置在真空反应炉内靠近炉壁处。分区的发热体被屏蔽体所遮盖,屏蔽体的内壁作为阳极,被处理的工件作为阴极,设有辉光放电用的电源,它向两极之间施加直流电压;此外,还设有发热体用的电源,它分别向上述分区设置的加热体供给交流电压。各个发
Patent application range Ion nitriding treatment device is characterized in that at least two heating zones are arranged above and below the heating body in a vertical arrangement and partitioned in a vacuum reaction furnace near the furnace wall. Partitioned heating element is covered by a shielding body, the inner wall of the shielding body acts as an anode, and the workpiece to be processed acts as a cathode. A power supply for glow discharge is provided which applies a direct current voltage between the two poles. In addition, Of the power supply, which respectively supplies the AC voltage to the heating body provided in the above-mentioned section. Each hair