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研制了浸没式等离子体表面改性装置，等离子体由外置等离子体源产生，使装置对材料的处理工艺变得灵活。配置的高抵压脉冲电源可进行单纯的等离子体注入，也可进行等离子体的注入与氮化，同时可对采用的工艺进行优化，因而提供了一种有效的等离子体表面改性方法。
A submerged plasma surface modification device was developed. The plasma was generated by an external plasma source, making the device flexible to the material handling process. The high-pressure impulse power supplies are configured for simple plasma injection, plasma injection and nitridation, and optimize the process used, thus providing an effective plasma surface modification.