光学元件经过激光预处理后 ,其抗激光破坏能力最大提高 2倍以上 ,系统研究激光预处理机理和工艺 ,能安全可靠地提高光学元件损伤阈值 ,提升高功率激光系统的能量密度。研究了几种 sol- gel膜、PVD膜在预处理前后膜层表面的变化 (损伤形貌 )以及损伤阈值的增幅 ,发现预处理过程膜层仍然发生了一定程度的轻微损伤 ,这种损伤和膜层本身缺陷、激光参数密切相关 ,预处理过程可逐步消除膜层缺陷 After laser pretreatment, the anti-laser damage ability of optical components is increased by more than 2 times. The mechanism and technology of laser pretreatment are systematically studied. The damage threshold of optical components can be increased safely and reliably, and the energy density of high power laser system can be improved. The changes (damage morphology) and the damage threshold of several sol-gel films and PVD films before and after pretreatment were studied. It was found that some slight damage still occurred to the pretreatment film layer. The film itself defects, laser parameters are closely related to the pretreatment process can gradually eliminate the film defects