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设计了一种基于反射激光莫尔信号的超精密定位装置,系统取反射的0次激光莫尔信号为控制信号,可实现高精度位置检测及超精密自动定位。针对反射式精密定位系统存在非线性,采用基于模糊神经网络的精密定位PID控制方法,利用模糊控制的模糊推理能力与神经网络的自学习能力,将模糊控制与RBF神经网络相结合在线(on line)调整PID控制参数,实现精密定位PID控制的自适应和智能化。实验结果表明,使用基于模糊神经网络的PID控制,控制响应快、稳定性好和鲁棒性强,可有效提高定位精度及定位速度,系统可获得±0.4μm的定位精度。
An ultra-precise positioning device based on reflected laser moiré signal is designed. The system takes reflected zero-order laser moiré signal as control signal, which can realize high-precision position detection and ultra-precision automatic positioning. Aiming at the problem that the reflective precision positioning system is non-linear, the precise positioning PID control method based on fuzzy neural network is adopted. Based on the fuzzy inference ability of fuzzy control and the self-learning ability of neural network, fuzzy control and RBF neural network are combined online ) Adjust PID control parameters, to achieve precise positioning PID control adaptive and intelligent. Experimental results show that PID control based on fuzzy neural network can control the response quickly, has good stability and strong robustness, and can effectively improve the positioning accuracy and positioning speed. The system can obtain the positioning accuracy of ± 0.4μm.