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等离子腐蚀和化学汽相淀积工艺所排出的废气对在这些工艺中使用的机械真空泵将产生有害影响。本文讨论了废气对泵组件和润滑油的影响,并提出了保护泵的防护措施。
Exhaust gases emitted by plasma etching and chemical vapor deposition processes have a detrimental effect on mechanical vacuum pumps used in these processes. This article discusses the effects of exhaust on pump components and lubricants, and presents protective measures to protect the pump.