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用大型低频辉光放电系统制造和研究了具有阻挡结构的非晶硅视象管靶,测量了靶面伏安特性和靶压对光谱响应的影响。制成了2/3英寸和1英寸两种实验样管,白光灵敏度高达2400μA/lm。光谱灵敏度在整个可见光范围都较高,峰值光电导增益在0.58μm附近接近0.8。信号电流随照度线性增加,γ值约为0.95。在工作电压下暗电流约为1—3nA。1英寸管的极限分辨率为800TVL,2/3英寸管的为700TVL。衰减惰性稍大,尚须改进。本文还讨论了此管的应用和某些尚待解决的问题。
The large-scale low-frequency glow discharge system was used to fabricate and study the amorphous silicon tube with blocking structure. The effects of the voltammetry of the target surface and the target pressure on the spectral response were measured. Made of 2/3 inch and 1 inch two experimental sample tube, white light sensitivity up to 2400μA / lm. The spectral sensitivity is high over the entire visible range and the peak photoconductive gain approaches 0.8 at around 0.58 μm. The signal current increases linearly with illuminance, with a gamma value of about 0.95. The dark current is about 1-3 nA at operating voltage. The 1-inch tube has a resolution of 800TVL and the 2/3-inch tube has 700TVL. Inert a little larger, still need to be improved. This article also discusses the application of this tube and some of the issues that remain to be solved.