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对高温ＣＶＤ和ＬＩＣＶＤ制备高纯纳米ＳｉＯ２粉末工艺进行了理论分析，并通过系统的实验研究，制取了大量极细颗粒ＳｉＯ２粉末。对制备的粉末进行透射电镜分析，比较了两种工艺的优劣。
The high temperature CVD and LICVD preparation of high purity nano-SiO2 powder process were analyzed theoretically, and through the systematic experimental study, prepared a large number of very fine particles of SiO2 powder. The prepared powders were analyzed by transmission electron microscopy, and the advantages and disadvantages of the two processes were compared.