论文部分内容阅读
制备包含α-Fe2O3与SnO2的双层气敏薄膜，研究发现：Ar＋刻蚀可同时除去薄膜表面的物理吸附氧和化学吸附氧，剩下晶格氧，因而O1s的XPS谱图变得对称．
The results show that the XPS spectrum of O1s becomes symmetrical when Ar + etching removes both physically adsorbed oxygen and chemisorbed oxygen and leaves the lattice oxygen behind.