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本文介绍一种采用全息光学元件构成的光触针式非接触光学测头,着重探讨了用电子束曝光法制作全息光学元件的一些技术问题,给出了部分计算机模拟及实验结果。
In this paper, a kind of optical stylus non-contact optical probe with holographic optical element is introduced. Some technical problems of making holographic optical element by electron beam exposure are emphatically discussed. Some computer simulations and experimental results are given.