科学技术的发展使人类在探索宏观世界的同时,也在向微观世界进军。在20世纪,空间技术、生物工程、信息科学、临床医学都得到了巨大发展。这些高技术在21世纪能否保持目前的发展势头,在一定程度上取决于微型机电系统的发展。 微型机电系统的研究始于20世纪60年代。自1987年美国加州大学首次 The development of science and technology has enabled mankind to march toward the micro-world while exploring the macro-world. In the 20th century, tremendous advances have taken place in space technology, bioengineering, information science and clinical medicine. Whether these high technologies can maintain the current momentum of development in the 21st century will depend to some extent on the development of MEMS. Micro-electromechanical system research began in the 1960s. Since the University of California in 1987 for the first time