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详细研究了衬底温度对超声喷雾热分解工艺制备的大面积绒面SnO2:F薄膜的影响和薄膜微结构与薄膜电学、光学性能之间的关系。试验曲线和SEM图的研究结果表明,将衬底温度从370℃提高到470℃以上薄膜结晶程度大大提高,晶粒尺寸明显增大;温度在470℃左右绒度达到13%。文章同时对超声喷雾热分解工艺制备大面积绒面SnO2:F薄膜做了工艺探索,并将实验制得的薄膜用于制备非晶硅薄膜电池,其效率达到了6.46%。
The effect of substrate temperature on the surface area of SnO2: F thin film prepared by the ultrasonic spray pyrolysis process and the relationship between the microstructure of the film and the electrical and optical properties of the films were investigated in detail. The experimental results and SEM images show that the crystallinity of the films increases greatly when the substrate temperature is raised from 370 ℃ to 470 ℃, and the grain size increases obviously. When the temperature is about 470 ℃, the velosity reaches 13%. In the meantime, the process of fabricating large area textured SnO2: F thin film by ultrasonic spray pyrolysis process was explored, and the experimentally prepared thin film was used to prepare amorphous silicon thin film battery with an efficiency of 6.46%.