研究了利用表面扩散渗硅 ,在高速钢基底上沉积金刚石的工艺方法 利用SEM ,X射线衍射技术检验了金刚石膜和试样表面组织的变化 结果表明 ,利用表面扩散渗硅 ,在高速钢表面形成富硅层 ,使过渡层有较高的含硅量 ,有利于在高速钢基底上沉积金刚石膜 The method of depositing diamond on high-speed steel substrate by surface diffusion silicon-on-silicon was studied. The change of diamond film and sample surface structure was tested by SEM and X-ray diffraction. The results show that the surface diffusion- Rich silicon layer, the transition layer has a higher silicon content, is conducive to the deposition of diamond film on a high-speed steel substrate