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本文提出的扫描电子热辐射测量(Scanning Electron Thermal Radiometry简称SETR)技术是基于:样品吸收调制电子束的能量部分转化为热能,在样品内部形成同频率的热波,引起样品温度场的周期性涨落,导致样品表面热辐射信号的变化,探测此信号而获得与样品热学性质及内部热波传播路径上的结构特征。扫描电子热辐射测量(SETR)技术综合了光热辐射测量(PTR)和扫描电子热声显微(SETAM)技术两者的优点,主要表现在激励源采用了电子束,易于聚焦,强度和调制频率易于控制,调节范围宽;采用辐射信号探测方式,有不接触、实时、可测样品范围广等特点。此外还能与SEM的现有有功能相结合进行综合成象和谱分析,以获得试样更全面的信息。
The proposed Scanning Electron Thermal Radiometry (SETR) technique is based on the fact that the energy of a modulated electron beam is partially absorbed by a sample and converted to heat energy to form a heat wave with the same frequency inside the sample, causing a periodic rise in the sample temperature field Which leads to the change of the thermal radiation signal on the surface of the sample. This signal is detected to obtain the thermal characteristics of the sample and the structural features on the propagation path of the internal thermal wave. The Scanning Electron Thermal Radiation Measurement (SETR) technology combines the advantages of both photothermal radiation measurement (PTR) and scanning electron thermophonemic microscopy (SETAM), primarily in the use of electron beams as the excitation source, easy focus, intensity and modulation Frequency easy to control, wide adjustment range; using radiation signal detection methods, there is no contact, real-time, measurable range of samples and so on. In addition, integrated imaging and spectral analysis can be combined with existing SEM capabilities to obtain more comprehensive information on the sample.