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研究了(Ti,Al)N薄膜的光学特性,对其反射和透射光谱作了仔细分析。运用Hadley方程,算出了一定成分(Ti,Al)N膜的折射率n,消光系数k随波长的变化关系。又根据透射曲线,计算出了(Ti,Al)N膜的光隙能。
The optical properties of (Ti, Al) N thin films were investigated and their reflection and transmission spectra were carefully analyzed. Using the Hadley equation, the refractive index n and the extinction coefficient k of a certain (Ti, Al) N film were calculated. According to the transmission curve, the optical energy of (Ti, Al) N film was calculated.