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前言由于精密仪器和精密机床具有精密的回转轴系,而其轴系精度的检验更是计量上的关键。为了解决过去在高精度轴系的检验中,以玻璃球作接触式测量所带来的机械误差问题,提出研磨一个超精度φ50mm钢球(不圆度小干0.05μ光洁度13
Preface As precision instruments and precision machine tools with a sophisticated rotary shaft system, and its shaft accuracy test is the key measurement. In order to solve the problem of mechanical error caused by contact measurement of glass balls in the past in the testing of high-precision shafting, it is proposed to grind an ultra-precision φ50 mm steel ball (small roundness of 0.05 μm finish 13