采用液相外延方法制作了平坦表面掩埋异质结构分布反馈激光器二极管。要改进激光器的特性,需要解决三方面的困难。第一个困难是在波纹上面的InGaAsP光波导层内形成许多小坑。另外两个困难是波纹的热变形以及沿台面边缘流动的漏泄电流。采用氧等离子体工艺清洁波纹表面解决了第一个困难。采用表面粗糙的GaAs平板片覆盖住波纹,减少了波纹的热变形。用一种新型腐蚀剂腐蚀台面,减小了漏泄电流。 A planar surface buried heterostructure distributed feedback laser diode was fabricated by liquid phase epitaxy. To improve the characteristics of lasers, three difficulties need to be solved. The first difficulty is the formation of many pits in the InGaAsP optical waveguide layer above the ripples. The other two difficulties are the thermal deformation of the corrugations and the leakage current flowing along the edge of the mesas. The first difficulty was solved with oxygen plasma cleaning of the corrugated surface. The corrugated surface is covered with a rough surface GaAs plate to reduce the thermal deformation of the corrugation. Corrosion of the mesa with a new etchant reduces the leakage current.