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本文报导了关于确定已给出实测反射和透射值的薄膜的光学常数和厚度的一种新的分析方法。与其他方法相比,本文的转换方法实际上是代数方法而不是数字方法。不需要初始的试解,也不存在错解。一般测量配置为不受膜层数限制的多层结构。但是,待求光学参数的薄膜一定要紧挨输出媒质的最后一层。本文叙述了分析方法,并对单层膜和多层膜结构做了实例介绍。
This paper reports a new analytical method for determining the optical constants and thicknesses of films that have given measured reflections and transmissivities. Compared with other methods, the conversion method in this paper is actually an algebraic method rather than a numerical method. Does not require initial trial, there is no wrong solution. The general measurement configuration is a multilayer structure that is not limited by the number of layers. However, the optical parameters of the film must be close to the final output layer of the media. This paper describes the analytical methods, and examples of single-layer film and multilayer film structure.