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随着我国无线通讯的飞速发展,通讯器件的微型化、低功耗、低成本、高性能与集成化等越来越受人们关注。基于微机电系统的薄膜体声波谐振器技术是实现系统低功耗与微型化的重要技术,薄膜体声波谐振器具有体积小、频率高、换能效率高等诸多优势。为了对基于微机电系统的薄膜体声波谐振器有一个更深层次的认识,文章阐述了薄膜体声波谐振器的基本结构与工作原理,并分析了薄膜体声波谐振器及技术的应用与发展趋势。
With the rapid development of wireless communication in our country, more attention has been paid to miniaturization, low power consumption, low cost, high performance and integration of communication devices. The thin film bulk acoustic resonator technology based on MEMS is an important technology to realize the low power consumption and miniaturization of the system. The thin film bulk acoustic resonator has the advantages of small size, high frequency and high energy conversion efficiency. In order to have a deeper understanding of MEMS-based thin-film bulk acoustic resonators, the basic structure and working principle of thin-film bulk acoustic resonators are expounded. The application and development trend of thin-film bulk acoustic resonators and their technologies are also analyzed.