本文利用平行板电极装置及飞行时间质谱仪相结合的方法对四甲基硅进行了多光子电离（ＭＰＩ）光谱及飞行时间（ＴＯＦ）质谱的研究。得到了激光激发波长在３８３～３７３ｎｍ内的多光子电离光谱，获得了某些波长点处的飞行时间质谱，并据此讨论了该分子可能的ＭＰＩ机理。 In this paper, the MPI and TOF mass spectra of tetramethylsilane were studied by the combination of parallel plate electrode and time-of-flight mass spectrometer. The multi-photon ionization spectra of laser excitation wavelength in 383 ~ 373nm were obtained, and the time-of-flight mass spectra at some wavelength points were obtained. The possible MPI mechanism of the molecule was discussed.