日本FANUC公司以生产NC系统闻名于世。它在光学码盘部件中使用了高精度的光学零件。为使这些零件达到高精度加工,最近研究开发了ROBO nano Ui型超精密复合微细加工机,对光学零件超精密加工能达到纳米级(10~(-9)m)精度。它与ROBOSHOTα-50i AP型电 Japan FANUC company is famous for producing NC system. It uses high-precision optical components in optical encoder components. In order to achieve high-precision machining of these parts, the ROBO nano Ui ultra-precision composite micromachining machine has recently been developed and developed to achieve nano-scale (10-9 m) precision for ultra-precision optical parts processing. It works with ROBOSHOTα-50i AP type