An apparatus for measuring mechanical properties of microstructures in tensile mode

来源 :中国科学：物理学、力学、天文学英文版 | 被引量 : 0次 | 上传用户：docsecurity02

【摘要】

：

An apparatus for measuring mechanical properties of microstructures in tensile mode is described. The apparatus consists of 4 functional parts: piezoelectric ac

【作者】

：

WU Hao MENG Yonggang SU Caijun

【机构】

：

StateKeyLaboratoryofTribology

【出处】

：

中国科学：物理学、力学、天文学英文版

【发表日期】

：

2004年z1期

【关键词】

：

MEMS TENSILE test microstructure MECHANICAL property PIEZOELECTRIC drive. ME

【基金项目】

：

This work was supported by the National Natural Science Foundation of China (Grant No.50135040), the National Basic Research Program of China (Grant No. 2003CB716205), and the Basic Research Fund of T

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An apparatus for measuring mechanical properties of microstructures in tensile mode is described. The apparatus consists of 4 functional parts: piezoelectric actuator, capacitive displacement sensor, specimen gripping mechanism and optical microscope. The

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An apparatus for measuring mechanical properties of microstructures in tensile mode

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