东京芝浦电气弱电技术研究所研制出采用微波等离子气体对金属表面进行氮化处理的新技术。该技术是用金属制天线,由波导管,再通过石英管,将微波能量发射到处理容器中。利用在石英管四周由微波能量产生的等离子气体中的活性氮原子和氮离子,对金属材料表面进行氮化处理。改善金属表面性能的方法,有气体氮化、盐浴氮化、离子氮化等,但与该所研制的新技术相比,新技术具有能进行低温处 Tokyo Shibaura Electric Institute of weak technology developed by the use of microwave plasma gas nitriding metal surface of the new technology. The technology is the use of metal antenna, the waveguide, and then through the quartz tube, the microwave energy emitted into the processing vessel. The surface of the metal material is nitrided using active nitrogen atoms and nitrogen ions in the plasma gas generated by the microwave energy around the quartz tube. Methods to improve the performance of metal surfaces, such as gas nitriding, salt bath nitriding, ion nitriding, etc., but compared with the new technology developed, the new technology has the ability to carry out low temperature