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【摘 要】
：
An uncooled poly SiGe microbolometer for infrared detection has been fabricated and characterized. The poly SiGe thin film is deposited by ultrahigh vacuum chem
【机 构】
：
Institute of Microelectronics, Tsinghua University, Beijing 100084
【出 处】
：
中国物理快报（英文版）
【发表日期】
：
2003年5期
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