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基于7阶SIR交指结构滤波器,提出了一种基于硅MEMS技术的微波S波段交指带通滤波器。不仅保留了交指结构的高通带选择性,而且可以通过调整SIR的阻抗比和电长度比来实现宽阻带。采用MEMS工艺,在双层高电阻率的硅片上完成了滤波器的制作和自封装,它具有体积小、损耗低的优点。仿真结果表明,该滤波器在中心频率2.35GHz处的相对带宽为30%,带内插损小于1.5dB,回波损耗大于15dB,在频率f_0±0.8GHz处的阻带抑制比大于50dB。该交指带通滤波器的体积仅为(11×7×0.8)mm~3。
Based on the 7th-order SIR interdigital structure filter, a microwave S-band inter-finger bandpass filter based on silicon MEMS technology is proposed. Not only the high passband selectivity of the cross-finger structure is preserved, but also the wide stopband can be achieved by adjusting the ratio of the impedance to the electrical length of the SIR. The use of MEMS technology, the double-high-resistivity of the silicon chip to complete the production of filters and self-packaging, it has the advantages of small size, low loss. The simulation results show that the filter has a relative bandwidth of 30% at center frequency of 2.35GHz, an in-band insertion loss of less than 1.5dB, a return loss of more than 15dB, and a rejection of more than 50dB at f0 ± 0.8GHz. The volume of the interdigital band-pass filter is only (11 × 7 × 0.8) mm ~ 3.