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分子泵是高真空系统的核心部件,通过对SB6键合机真空系统和分子泵特性的分析,总结讨论了3个可能导致分子泵损坏的键合工艺过程,最后,提出对工艺腔净化过程的一个软件改进办法,这个改进的思路对从事半导体设备维修的专业人员而言是有一定帮助的。
Molecular pump is the core component of high vacuum system. Through the analysis of vacuum system and molecular pump characteristics of SB6 bonding machine, three bonding processes that may cause damage to the molecular pump are summarized. Finally, A software improvement approach, this idea of improvement for the semiconductor equipment maintenance professionals in terms of some help.