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用磁控射频溅射法制备了FeCoAlON薄膜,研究了Al-O和N元素的添加对FeCo合金薄膜的软磁性的影响.研究结果表明:随着Al,O,N元素添加量的增加,薄膜微结构从多晶转化到纳米晶再转化到非晶态,薄膜表现为软磁性;在N的含量较高时,薄膜呈现条形畴结构,本文对条形畴结构出现的机理和条件作了详细讨论,并发现具有条形畴结构的薄膜的磁导率频率特性具有多峰共振的特点.
The effects of Al-O and N addition on the soft magnetic properties of FeCo alloy films were investigated by using magnetron RF sputtering. The results show that with the addition of Al, O and N, The microstructures transform from polycrystalline to nanocrystalline to amorphous, and the films show soft magnetic properties. When the content of N is high, the films present a strip-shaped domain structure. The mechanism and conditions for the appearance of the striped domain structures In detail, it is found that the magnetic permeability frequency characteristics of the film having a bar-shaped domain structure have the characteristics of multi-peak resonance.