Thermal phase change and activation energy of crystallization of Ge-Sb-Te-Sn thin films

来源 :Chinese Optics Letters | 被引量 : 0次 | 上传用户:jonathan
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To improve the optical storage performance, Sn was doped into Ge2Sb2Te5 phase change thin films. The optical and thermal properties of Sn-doped Ge2Sb2Te5 film were investigated. The crystal structures of the as-sputtered and the annealed films were identified by the X-ray diffraction (XRD) method. The differential scanning calorimeter (DSC) method is used to get the crystallization temperature and crystallization energy (Ea). It was found that proper Sn-doping could highly improve storage performance of the Ge2Sb2Te5 media. The optical structures of the as-sputtered and the annealed films were identified by the X-ray. To improve the optical storage performance, Sn was doped into Ge2Sb2Te5 phase change thin films. The optical and thermal properties of Sn-doped Ge2Sb2Te5 films were investigated. It was found that proper Sn-doping could improve storage performance of the Ge2Sb2Te5 media.
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