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系统压力是低压金刚石薄膜生长实验中重要的实验参数，如果采用合理的计算方法定量化地预测出压力对金刚石薄膜生长条件的影响，则可以直接用于指导其实验研究。本文报道根据非平衡热力学耦合理论模型绘制了ＣＨ体系金刚石生长投影相图，经与大量实验结果比较相一致，并系统地计算了压力变化的碳氢体系金刚石生长非平衡定态截面相图，得到了金刚石生长区随压力变化的规律。计算得到的相图与经典平衡相图有本质不同，均有金刚石生长区，因而可以合理解决金刚石低压下连续生长而石墨被腐蚀与经典平衡热力学之间的矛盾。本文的计算结果可以为金刚石生长实验提供定量化的压力条件的选择和优化实验条件。
System pressure is an important experimental parameter in low-pressure diamond film growth experiment. If a reasonable calculation method is used to quantitatively predict the influence of pressure on the growth conditions of diamond film, it can be directly used to guide the experimental research. In this paper, according to the coupling theory of non-equilibrium thermodynamics model, the C-H system diamond growth projection phase diagram is drawn, which is consistent with a large number of experimental results and systematically calculates the pressure change of diamond growth of unequal equilibrium stationary phase diagram , The law of the diamond growth zone with pressure is obtained. The calculated phase diagram is essentially different from the classical equilibrium phase diagram, both of which have diamond growth zones. Therefore, it is possible to reasonably solve the contradiction between the continuous growth of diamond under low pressure and the corrosion of graphite and the classical equilibrium thermodynamics. The results of this paper can provide quantitative conditions for the selection of diamond growth experiments and optimize the experimental conditions.