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研制了用于测量光学非球面面形的条纹扫描型棱镜式剪切干涉仪。介绍了该仪器的测量原理、电路和数据处理过程。还推出了二次曲面与最适球面的差值。这样,当最适球面半径与被测件孔径相比很大时不测最适球面半径也可得到被测面相对于设计值的偏差。最后给出了一个非球面面形的测量例。
A stripe-scanning prism-type shear interferometer was developed for the measurement of optical aspheric surface shape. The instrument’s measuring principle, circuit and data processing are introduced. Also introduced the quadratic surface and the optimal spherical difference. In this way, when the optimum spherical radius and the measured aperture is large, the optimum spherical surface radius can also get the deviation of the measured surface relative to the design value. Finally, a measurement example of aspherical surface shape is given.