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为了提高加速度计的灵敏度,以适应高精度测量的需要,加速度计光学传感器结构灵敏度的提高是至关重要的。在比较了现有光栅加速度计光学传感结构的基础上,提出了一种新型的基于微米光栅的加速度计光学传感器结构的理论设计,建立了数学模型,并对其光学结构的性能进行了分析。给出了衍射光光强分布的理论公式,利用Matlab绘制出光强的变化曲线,分析了光学结构参数对传感器灵敏度的影响。通过改变光学结构的主要参数,能够提高光学传感器结构的灵敏度。进行了光学传感器结构的演示实验,实验结果验证了理论分析的正确性。
In order to improve the sensitivity of the accelerometer to meet the needs of high-precision measurement, accelerometer optical sensor structure to improve the sensitivity is essential. Based on the comparison of the existing grating accelerometer optical sensor structure, a new type of optical grating based accelerometer optical sensor is proposed. The theoretical design of the optical sensor structure is established. The mathematical model is established and its optical structure performance is analyzed . The theoretical formula of the light intensity distribution of the diffracted light is given. The curve of the light intensity is plotted by Matlab, and the influence of the optical structural parameters on the sensitivity of the sensor is analyzed. By changing the main parameters of the optical structure, the sensitivity of the optical sensor structure can be increased. The experiment of the optical sensor structure was carried out. The experimental results verify the correctness of the theoretical analysis.