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The roles of laser-induced defects and native defects in multilayer mirrors under multi-shot irradiation condition are investigated. The HfO 2 /SiO 2 dielectric mirrors are deposited by electron beam evaporation(EBE) . Laser damage testing is carried out on both the 1-on-1 and S-on-1 regimes using 355-nm pulsed laser at a duration of 8 ns. It is found that the single-shot laser-induced damage threshold(LIDT) is much higher than the multi-shot LIDT. In the multi-shot mode,the main factor influencing LIDT is the accumulation of irreversible laser-induced defects and native defects. The surface morphologies of the samples are observed by optical microscopy. Moreover,the number of laser-induced defects affects the damage probability of the samples. A correlative model based on critical conduction band(CB) electron density(ED) is presented to simulate the multi-shot damage behavior.
The roles of laser-induced defects and native defects in multilayer mirrors under multi-shot irradiation conditions are investigated. The HfO 2 / SiO 2 dielectric mirrors are deposited by electron beam evaporation (EBE). Laser damage testing is carried out on both the 1 -on-1 and S-on-1 regimes using 355-nm pulsed laser for a duration of 8 ns. It is found that the single-shot laser-induced damage threshold (LIDT) is much higher than the multi-shot LIDT. In the multi-shot mode, the main factor influencing LIDT is the accumulation of irreversible laser-induced defects and native defects. Moreover, the number of laser-induced defects affects the damage probability of the samples. A correlative model based on critical conduction band (CB) electron density (ED) is presented to simulate the multi-shot damage behavior.