化学气相沉积法生长金刚石薄膜是利用含碳的有机气体做为金刚石生长碳物质来源。在不同形式能量的作用下发生分解反应,分离出碳离子。碳离子需要一定的能量使其保持等离子态,等离子态的碳碰撞在诸如Si等合适基底材料上时,便生长出金刚石。 若假设P是凝聚区的实际碳源气浓度,P~0为金刚石、碳平衡气体浓度,根据直接碰撞近 CVD growth of diamond film is the use of carbon-containing organic gases as a source of diamond growth carbon material. In the role of different forms of energy decomposition reaction, separation of carbon ions. Carbon ions require a certain amount of energy to maintain their plasma state, and diamonds grow when plasma-state carbon hits on a suitable substrate material such as Si. If it is assumed that P is the actual carbon source concentration in the coalescence zone, P ~ 0 is the concentration of diamond and carbon balance gas, and according to the direct collision