论文部分内容阅读
溅射MoS_2膜显微结构的生长可分为与膜厚有关的三个阶段:(1)成核时形成突起,(2)等轴转化区域和(3)针状结构。每个生长阶段是依据微晶的大小、形状和排列方向来表征的。有效润滑膜的厚度是依据滑动试验时显微结构生长阶段来确定的,此膜在柱状结构区域有破裂的倾向,实际润滑由保留下的0.18～0.22微米厚的膜来完成。为了评价溅射MoS_2膜的完整性还提出了一种直观的方法。润滑性能是用擦抹前后的光学性能变化来识别的,微晶的取向导致所观察到的光学上反射性的变化。
The growth of the sputtered MoS_2 film microstructure can be divided into three stages related to the film thickness: (1) nucleation process, (2) equiaxed conversion area and (3) acicular structure. Each growth phase is characterized by the crystallite size, shape and orientation. The thickness of the effective lubricating film is determined by the microstructure growth phase at the time of the sliding test. The film tends to rupture in the columnar structure region, and the actual lubrication is performed by the remaining 0.18 to 0.22-micron thick film. In order to evaluate the integrity of the sputtered MoS 2 film, an intuitive method was also proposed. Lubrication performance is identified by changes in optical properties before and after wiping and the orientation of the crystallites results in the observed change in optical reflectivity.