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原子力显微镜靶丸4π旋转装置,可以将靶丸在夹持状态下实现4π方向旋转,便于原子力显微镜对靶丸表面任一部分做扫描测量。应用该装置对各种靶丸的表面形貌进行了测量,测量结果表明,靶丸外表面粗糙度小于10nm,内表面粗糙度小于20nm。
Atomic force microscope 4π rotation device, the target can be achieved in the clamping state 4π direction of rotation, atomic force microscope to facilitate scanning of any part of the surface of the target. The device was used to measure the surface topography of various kinds of pellets. The measurement results showed that the outer surface roughness of the pellets was less than 10 nm and the inner surface roughness was less than 20 nm.