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Structures and Properties of Boron Carbonitride Films by Plasma-based Ion Implantation and Depositio
【机 构】
：
College of Engineering and Technology, Northeast Forestry University, Harbin 150040, P.R China
【出 处】
：
The 11th International Workshop on Plasma-Based Ion Implanta
【发表日期】
：
2011年3期
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