3D Nano Printing

来源 :第6届纳米操纵、制造与测量国际会议( the International Conference IEEE 3M-NANO | 被引量 : 0次 | 上传用户:vay_b
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  In this talk,I will introduce the concept of 3D nano printing which was achieved by our invention of super-resolution photoinduction-inhibition nanolithography,enabling to break the diffraction barrier that has governed the optical instruments for over 140 years.More importantly,by combining our invention of multifocal microscopy,we have demonstrated optical fabrication with great resolution comparable to E-beam lithography but with three-dimensional capability and unprecedented throughput.This technique opens new pathway to produce functional 3D nano structures.
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There is increasing interest and demand for nanomanufacturing technologies that are scalable both in spatial dimension(i.e.large areas)and in time(high speed).For example,to address the growing market
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